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In my oppinion, laser triangulation is the outstanding method for obtaining high accuracy scans. The combination of laser triangulation and a 3D camera can capture details of up to 5um.
The AQSENSE SAL3D Peak Detector Tool provides unparalleled laser stripe detection for triangulation applications.
With this new detection technique, height variations as small as 5 microns can be detected with 90 degrees between camera and laser, with a Field of View of 130mm.
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